Surface micromachined membranes for tunnel transducers
نویسندگان
چکیده
We have developed low-temperature surface micromachining procedures for the fabrication of suspended SiO2 /Si3N4 membranes. This fabrication method was integrated with electron beam lithography, anisotropic ion etching, and electroplating to construct electrostatically deflectable tunnel transducers. We show the structures and some preliminary measurements on the performance of these monolithic devices. © 1997 American Vacuum Society. @S0734-211X~97!09906-X#
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